Skip to main navigation Skip to search Skip to main content

Bilayer Lift-Off Process for Aluminum Metallization

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
JournalPhysics Faculty Research
StatePublished - Jan 1 2015

Keywords

  • lift-off resist; granular aluminum bolometer
  • two-step development method
  • undercut

Disciplines

  • Physical Sciences and Mathematics
  • Physics

Cite this