@article{8c9bd00b7aec45d080388cee289a3a76,
title = "Bilayer Lift-Off Process for Aluminum Metallization",
keywords = "lift-off resist; granular aluminum bolometer, two-step development method, undercut",
author = "Wilson, \{Thomas E.\} and Konstantin Korolev and Crow, \{Nathaniel A.\}",
note = "Thomas E. Wilson, Konstantin A. Korolev and Nathaniel A. Crow, “Bilayer Lift-Off Process for Aluminum Metallization,” Journal of Micro/Nanolithography MEMS MOEMS, 14(1), 014501-1, (2015).",
year = "2015",
month = jan,
day = "1",
language = "American English",
journal = "Physics Faculty Research",
}